Specific Process Knowledge/Etch/Wet Polysilicon Etch: Difference between revisions
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'''NB: The life time of the solution is only a few days.''' | '''NB: The life time of the solution is only a few days.''' | ||
'''The user manual and contact information can be found in LabManager:''' | |||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=129 Isotropic Etch/Poly Etch info page in LabManager] | |||
===PolySi Etch data=== | ===PolySi Etch data=== | ||