Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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9.9nm/min (13-12-2011) | 9.9nm/min (13-12-2011) | ||
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!SEM images of the etch profile | !SEM images of the etch profile (click to view a larger image) | ||
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<gallery widths=" | <gallery widths="150px" heights="150px" perrow="2"> | ||
image:IBE_Au_Ti_nr13_1.jpg|several 600nm line profiles through Ti and Au. | image:IBE_Au_Ti_nr13_1.jpg|several 600nm line profiles through Ti and Au. | ||
image:IBE_Au_Ti_nr13_2.jpg|600nm line profile through Ti and Au. | image:IBE_Au_Ti_nr13_2.jpg|600nm line profile through Ti and Au. | ||
</gallery> | </gallery> | ||
<gallery widths=" | <gallery widths="150px" heights="150px" perrow="3"> | ||
image: | image:IBE_Au_Ti_uden_Ti_nr13_1.jpg|several 600nm line profiles in Au after Ti has been removed. | ||
image: | image:IBE_Au_Ti_uden_Ti_nr13_2.jpg|600nm line profile in Au after Ti has been removed. | ||
image:IBE_Au_Ti_uden_Ti_nr13_3.jpg|600nm line profile in Au after Ti has been removed. | |||
</gallery> | </gallery> | ||