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Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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<gallery widths="200px" heights="150px" perrow="2">  
<gallery widths="200px" heights="150px" perrow="2">  
image:IBE_Au_Ti_nr13_1.jpg|Different chemicals for the MVD.  
image:IBE_Au_Ti_nr13_1.jpg|several 600nm line profiles through Ti and Au.  
image:IBE_Au_Ti_nr13_2.jpg|The chemical reaction in which the Cl atoms of the precursors are eliminated under formation of HCl.  
image:IBE_Au_Ti_nr13_2.jpg|600nm line profile through Ti and Au.
</gallery>  
</gallery>  
<gallery widths="200px" heights="150px" perrow="2">
image:IBE_Au_Ti_nr13_1.jpg|several 600nm line profiles through Ti and Au.
image:IBE_Au_Ti_nr13_2.jpg|600nm line profile through Ti and Au.
</gallery>
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