Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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*~1µm to 15 µm | *~1µm to 15 µm | ||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Film thickness accuracy | |||
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*±(0.5%+50Å) | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Index accuracy | |||
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*±0.001 | |||
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!style="background:silver; color:black" align="left"|Process parameter range | !style="background:silver; color:black" align="left"|Process parameter range | ||