Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 139: | Line 139: | ||
<br clear="all" /> | <br clear="all" /> | ||
} | |||
===Comparing different BHF baths=== | ===Comparing different BHF baths=== | ||
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" | {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" | ||