Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 75: / Line 75: @@
 <span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography#top|Go to top of this page]]</span>
+To request for an e-beam training session, contact e-beam@danchip.dtu.dk; a DTU Danchip personnel will hereafter provide a time slot. Users require at least 4 training sessions before being allowed full acccess to the machine.
+For safety reasons, even fully trained users are only authorizedd to mount substrates into the e-beam cassettes, but not authorized to load the cassettes into the autoloader.
+There are two daily loading sessions:
+:00 - 10:30
+:30 - 14:00
+To use the e-beam writer, book the machine via LabManager, show up to the loading session before your exposure to mount your substrate and pre-align if necessary.
+After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an empty cassette into the autoloader.
+If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Danchip personel unmount your substrates.
-'''To request a training session or a time-slot for the e-beam, contact the e-beam team via this link:
-'''[mailto:e-beam@danchip.dtu.dk?Subject=E-beam%20Request&body=Name:%20%0A%0DProject/sponsor:%0A%0DNumber,%20size%20and%20type%20of%20samples:%0A%0DCondition%20file:%0A%0DEstimated%20exposure%20time:%0A%0DOptical%20Alignment?%0A%0DPlease%20specify%20level%20of%20training%20required%20and%20whether%20jdf-%20,%20sdf%20and%20gds-files%20are%20ready%20to%20mgn-conversion: e-beam@danchip.dtu.dk]''''''
-You need 3-4 training sessions before being allowed to use the e-beam writer. You can get training in loading and unloading samples into a cassette, to optically pre-align the samples, to calibrate the writer, to perform 2nd alignment and start exposure. '''For safety reasons, the costumer is however not allowed to load or unload cassettes to or from the e-beam writer.'''
 Before you request for a training, it is crucial to have your pattern ready in either tdb-format or GDSII format. Also, check your pattern in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> before requesting. In order to reach the files from the computers inside the cleanroom, it is recommended to either dropbox them or send them per email to yourself.