Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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*40% HF | *40% HF | ||
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*SiO etch ( | *SiO etch (BHF with a wetting agent) | ||
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|style="background:LightGrey; color:black"|Temperature | |style="background:LightGrey; color:black"|Temperature | ||