Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions

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 |style="background:LightGrey; color:black"|Chemical solution
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-*28 wt% mixed in the ratio
+*BHF 12%HF with Ammoniumflouride
-KOH:H<sub>2</sub>O - 500 g : 1000 ml
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-*28 wt% mixed in the ratio
+*5% HF
-KOH:H<sub>2</sub>O - 500 g : 1000 ml
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-*28 wt% mixed in the ratio
+*40% HF
-KOH:H<sub>2</sub>O:IPA - 500 g : 1000 ml : ?? ml
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-*Custom made
+*SiO etch
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 |style="background:LightGrey; color:black"|Temperature