Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions

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 *:[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see KBA here]
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-!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Performance
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 *A little higher etch rates than BHF
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-!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range
+!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
 |style="background:LightGrey; color:black"|Chemical solution
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