Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>KOH Fumehood</b> | |style="background:WhiteSmoke; color:black"|<b>KOH Fumehood</b> | ||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60" rowspan="2"|Purpose | ||
|style="background:LightGrey; color:black"|Wet etch of Silicon | |style="background:LightGrey; color:black"|Wet etch of Silicon | ||
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*Etch of Silicon in 28 wt% KOH | |||
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*Etch of Silicon in 28 wt% KOH | |||
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*Etch of Silicon in 28 wt% KOH saturated with IPA | |||
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*Etch of Silicon in user mixed KOH | |||
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|style="background:LightGrey; color:black"|Links to APV and KBS | |||
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*Etch of Silicon in 28 wt% KOH | *Etch of Silicon in 28 wt% KOH | ||