Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
No edit summary |
|||
| Line 125: | Line 125: | ||
| | | | ||
| | | | ||
| | |[[Specific_Process_Knowledge/Lithography/Coaters#SSE Spinner|SSE]], [[Specific_Process_Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]] | ||
| | | | ||
| | | | ||
| Line 139: | Line 139: | ||
| | | | ||
| | | | ||
| | |[[Specific_Process_Knowledge/Lithography/Coaters#SSE Spinner|SSE]], [[Specific_Process_Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]] | ||
| | | | ||
| | | | ||
| Line 148: | Line 148: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''AZ MiR 701''' | |'''AZ MiR 701''' | ||
|Positive | |||
| | | | ||
| | | | ||
| | | | ||
| | |[[Specific_Process_Knowledge/Lithography/Coaters#Spin Track 1 + 2|Spin Track 1 + 2]] | ||
| | | | ||
| | | | ||