Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*Spraying imprint resist | |||
*Spraying photoresist | |||
*Spraying of other solutions | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance | ||
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* Cassette-to-cassette | * Cassette-to-cassette | ||
|colspan="2" align="center"|Single substrate | |colspan="2" align="center"|Single substrate | ||
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* Can handle almost any sample size and shape | |||
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|style="background:LightGrey; color:black"|Permanent media | |style="background:LightGrey; color:black"|Permanent media | ||
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* PGMEA for spinner bowl cleaning and vapor tip bath | * PGMEA for spinner bowl cleaning and vapor tip bath | ||
|colspan="2" rowspan="2" align="center"|Only manual dispense | |colspan="2" rowspan="2" align="center"|Only manual dispense | ||
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* No permanent media | |||
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* no | * no | ||
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* Two syringe pumps | |||
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** 3x3 mm2 - 6" | ** 3x3 mm2 - 6" | ||
** Max 4 mm thick | ** Max 4 mm thick | ||
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*Any sample(s) that fit inside machine | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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*III-V materials | *III-V materials | ||
*Si, SiO2, SOI | *Si, SiO2, SOI | ||
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*All chemicals to be spray coated must be approved specifically for spray coating | |||
*Any non-toxic, non-particulate and non-crosslinking material is likely to be approved | |||
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