Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Film thickness range | |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Film thickness range | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*~ | *~20Å to 2 µm (depending of the material) | ||
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!style="background:silver; color:black" align="left"|Process parameter range | !style="background:silver; color:black" align="left"|Process parameter range | ||