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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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==SU8 hotplates==
==SU8 hotplates==
We have two hotplates, there are possibilities for adjusting time, temperature and temperature slope.
We have four dedicated SU-8 hotplates in CR3.
Users can control the ramp-time, time and temperature.
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= Ovens =
= Ovens =
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