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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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*2 syringe lines, which can be used for spinning of e-beam resist.  
*2 syringe lines, which can be used for spinning of e-beam resist.  


The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager: Equipment info in LabManager  
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=188 LabManager]'''


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