Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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We have ESPACER in stock and approved for use in the cleanroom but have not yet had the chance to investigate the material. | We have ESPACER in stock and approved for use in the cleanroom but have not yet had the chance to investigate the material. | ||
[[Espacer_300_Technical_Info.pdf|Espacer_300_Technical_Info.pdf]] | [[media:Espacer_300_Technical_Info.pdf|Espacer_300_Technical_Info.pdf]] | ||
[[Espacer_catalog.pdf|Espacer_catalog.pdf]] | [[media:Espacer_catalog.pdf|Espacer_catalog.pdf]] | ||
[[ | [[media:Process_Flow_ZEP_ESPACER.docx|Process_Flow_ZEP_ESPACER.docx]] | ||