Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions

Revision as of 15:10, 13 December 2007

Ellipsometer

Filmtek 4000

A rough overview of the performance of the FilmTek and some process related parameters

Purpose	Film thickness measurements and optical characterization of optically transparent thin films	Measurement of (multi layer) film thickness (only one unknown layer) Optical constants Surface roughness
Performance	Thin film materials that can be measured	Any film that is transparent to the light in the given wavelength range ex: Silicon Oxide Silicon nitride PolySilicon Photoresists SU8 Other polymers Very thin layers of metals (<20 nm) and many more
.	Film thickness range	<100 Å to 250 µm (depending of the material)
Process parameter range	Wavelength range	400-1000 nm
Substrates	Batch size	One sample at a time - all sample larger than 5x5 mm²sizes up to 6"
.	Substrate material allowed	In principle all materials Only pure silicon, silicon oxides, silicon nitrides and quartz may be in direct contact with the surface of the stage. If you have metals, III-V materials or polymers on the back side of the substrate the please mount your sample on a silicon carrier wafer.

Prism Coupler

Comparison of the three methods

See here: Film thickness and optical constants of optical transparent films

@@ Line 4: / Line 4: @@
 <br clear="all" />
+==A rough overview of the performance of the FilmTek and some process related parameters==
+{| border="2" cellspacing="0" cellpadding="10"
+|-
+!style="background:silver; color:black;" align="left"|Purpose
+|style="background:LightGrey; color:black"|Film thickness measurements and optical characterization of optically transparent thin films||style="background:WhiteSmoke; color:black"|
+*Measurement of (multi layer) film thickness (only one unknown layer)
+*Optical constants
+*Surface roughness
+|-
+!style="background:silver; color:black" align="left"|Performance
+|style="background:LightGrey; color:black"|Thin film materials that can be measured||style="background:WhiteSmoke; color:black"|
+Any film that is transparent to the light in the given wavelength range
+ex:
+*Silicon Oxide
+*Silicon nitride
+*PolySilicon
+*Photoresists
+*SU8
+*Other polymers
+*Very thin layers of metals (<20 nm)
+*and many more
+|-
+|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Film thickness range
+|style="background:WhiteSmoke; color:black"|
+*<100 Å to 250 µm (depending of the material)
+|-
+!style="background:silver; color:black" align="left"|Process parameter range
+|style="background:LightGrey; color:black"|Wavelength range
+|style="background:WhiteSmoke; color:black"|
+*400-1000 nm
+|-
+!style="background:silver; color:black" align="left"|Substrates
+|style="background:LightGrey; color:black"|Batch size
+|style="background:WhiteSmoke; color:black"|
+*One sample at a time - all sample larger than 5x5 mm<sup>2</sup>sizes up to 6"
+|-
+|style="background:silver; color:black"|.|| style="background:LightGrey; color:black"|Substrate material allowed
+|style="background:WhiteSmoke; color:black"|
+*In principle all materials
+*Only pure silicon, silicon oxides, silicon nitrides and quartz may be in direct contact with the surface of the stage. If you have metals, III-V materials or polymers on the back side of the substrate the please mount your sample on a silicon carrier wafer.
+|-
+|}
+<br clear="all" />
 ==Prism Coupler==
 ==Comparison of the three methods==
 See here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]]