Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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==Prism Coupler== | ==Prism Coupler== | ||
==Comparison of the three methods== | |||
See here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] |
Revision as of 14:25, 13 December 2007
Ellipsometer
Filmtek 4000
Prism Coupler
Comparison of the three methods
See here: Film thickness and optical constants of optical transparent films