Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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On the L-drive, a logbook for the e-beam writer can be found. Sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program; please use this prior to requesting e-beam sessions. If in doubt how to use it, contact the e-beam team at [mailto:e-beam@danchip.dtu.dk]. | On the L-drive, a logbook for the e-beam writer can be found. Sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program; please use this prior to requesting e-beam sessions. If in doubt how to use it, contact the e-beam team at [mailto:e-beam@danchip.dtu.dk]. | ||
'''There are 3 [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view& | '''There are 3 [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 manuals] for the e-beam writer: | ||
* A user manual describing the standard procedure when e-beam writing | * A user manual describing the standard procedure when e-beam writing | ||
* A jdf-, and sdf-file manual describing how to prepare sdf-, and jdf-files (found under 'Technical Documents') | * A jdf-, and sdf-file manual describing how to prepare sdf-, and jdf-files (found under 'Technical Documents') | ||