Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 114: | Line 114: | ||
The system is equipped with 2 different resists lines: | The system is equipped with 2 different resists lines: | ||
*AZ5214E | *AZ5214E | ||
*AZ4562 and | *AZ4562 | ||
and | |||
*2 syringe lines, which can be used for spinning of e-beam resist. | *2 syringe lines, which can be used for spinning of e-beam resist. | ||