Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
|style="background:LightGrey; color:black"|Deposition of dielectrica ||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Deposition of dielectrica | | ||
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*Silicon oxide | *Silicon oxide | ||
*Silicon nitride | *Silicon nitride | ||