Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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* AZ MiR 701 (29cps) resist | * AZ MiR 701 (29cps) resist | ||
* AZ nLOF 2020 resist | * AZ nLOF 2020 resist | ||
* PGMEA for backside rinse and | * PGMEA for backside rinse and edge-bead removal | ||
* PGMEA for spinner bowl cleaning and vapor tip bath | * PGMEA for spinner bowl cleaning and vapor tip bath | ||
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