Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom 2]] | [[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom 2]] | ||
The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. | The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. <br/> | ||
The ellipsometer M2000V is a in-situ ellipsometer fraom J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements. | The ellipsometer M2000V is a in-situ ellipsometer fraom J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements. | ||