Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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===Process information=== | ===Process information=== | ||
MMDS priming only: | |||
*T1 T2 Standard | |||
AZ MiR 701 (29cps) coating: | |||
*T1 MiR 701 1,5um no HMDS | |||
*T1 MiR 701 1,5um with HMDS | |||
*T1 MiR 701 1um no HMDS | |||
*T1 MiR 701 1um with HMDS | |||
*T1 MiR 701 2um no HMDS | |||
*T1 MiR 701 2um with HMDS | |||
Link to process pages - e.g. one page for each material | Link to process pages - e.g. one page for each material | ||