Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
| Line 136: | Line 136: | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
AZ MiR 701 (29cps) | AZ MiR 701 (29cps) | ||
positive | |||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
AZ nLOF 2020 | AZ nLOF 2020 | ||
negative | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||