Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*Soft baking | *Soft baking | ||
*Post-exposure baking | *Post-exposure baking | ||
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!style="background:silver; color:black;" align="center" width="60"|Resist | |||
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AZ MiR 701 (29cps) | |||
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AZ nLOF 2020 | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||