Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
| Line 133: | Line 133: | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Coating thickness | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1-3 µm | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1.6-5 µm | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Response 2 | |style="background:LightGrey; color:black"|Response 2 | ||