Specific Process Knowledge/Wafer cleaning: Difference between revisions
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== Clean with: == | == Clean with: == | ||
*RCA - '' | *[[Cleaning with RCA|RCA]] - ''Two step process to remove organics and metals'' | ||
*7-up - ''piranha etch of wafers and masks - removes | *[[Cleaning with 7-up|7-up]] - ''Fake piranha etch of wafers and masks - removes organics and alkali ions'' | ||
*BHF - ''etching of predep glass'' | *[[Cleaning with Piranha|Piranha]] - ''Removes organics and alkali ions'' | ||
*[[Cleaning with BHF|BHF]] - ''Removing native oxide, etching of predep glass etc.'' | |||
*[[Cleaning with IMEC|IMEC]] - ''Cleaning before fusion bonding'' | |||
*[[Cleaning with Soap Sonic|Soap Sonic]] - ''Cleaning of "dirty" wafers when entering the cleanroom'' | |||
Revision as of 15:13, 4 October 2007
Clean with:
- RCA - Two step process to remove organics and metals
- 7-up - Fake piranha etch of wafers and masks - removes organics and alkali ions
- Piranha - Removes organics and alkali ions
- BHF - Removing native oxide, etching of predep glass etc.
- IMEC - Cleaning before fusion bonding
- Soap Sonic - Cleaning of "dirty" wafers when entering the cleanroom