Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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==Ellipsometer VASE and Ellipsometer M-2000V [[Image:section under construction.jpg|70px]]== | ==Ellipsometer VASE and Ellipsometer M-2000V [[Image:section under construction.jpg|70px]]== | ||
[[image: | [[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom 2]] | ||
The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. | The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. | ||