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Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions

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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black"|Response 1
|style="background:LightGrey; color:black"|Films that can be examined
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|style="background:WhiteSmoke; color:black"|
*Performance range 1
Any film that is transparent to the light in the given wavelength range
*Performance range 2
e.g.:
*Silicon Oxide
*Silicon nitride
*PolySilicon
*Resists
*Polymers
*Very thin layers of metals
*and many more
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Performance range 1
Any film that is transparent to the light in the given wavelength range
*Performance range 2
e.g.:
*Performance range 3
*Silicon Oxide
*Silicon nitride
*PolySilicon
*Resists
*Polymers
*Very thin layers of metals
*and many more
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|style="background:LightGrey; color:black"|Response 2
|style="background:LightGrey; color:black"|Response 2