Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Films that can be examined | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | Any film that is transparent to the light in the given wavelength range | ||
* | e.g.: | ||
*Silicon Oxide | |||
*Silicon nitride | |||
*PolySilicon | |||
*Resists | |||
*Polymers | |||
*Very thin layers of metals | |||
*and many more | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | Any film that is transparent to the light in the given wavelength range | ||
* | e.g.: | ||
* | *Silicon Oxide | ||
*Silicon nitride | |||
*PolySilicon | |||
*Resists | |||
*Polymers | |||
*Very thin layers of metals | |||
*and many more | |||
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|style="background:LightGrey; color:black"|Response 2 | |style="background:LightGrey; color:black"|Response 2 | ||