Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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*Performance range | *Performance range | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range | ||
|style="background:LightGrey; color:black"|Wavelength range | |style="background:LightGrey; color:black"|Wavelength range | ||
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*5mm (spot size on the sample depends on the angle) | *5mm (spot size on the sample depends on the angle) | ||
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|style="background:LightGrey; color:black"|Mapping facility | |||
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*Can make wafermaps on up to 150mm wafers | |||
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*No mapping facility | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Accessories | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Accessories | ||