Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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== [[Deepetch]] == | == [[Deepetch]] == | ||
{| border="2" cellpadding="2" cellspacing="1 | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ The deepetch recipe | |+ The deepetch recipe | ||
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image:jmldeep071101 pos5 50mu_013.jpg|The profile of a 50 <math>\mu</math>m trench | image:jmldeep071101 pos5 50mu_013.jpg|The profile of a 50 <math>\mu</math>m trench | ||
</gallery> | </gallery> | ||
== Standardization procedure on the ASE == | == Standardization procedure on the ASE == | ||