Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions
| Line 28: | Line 28: | ||
|style="background:LightGrey; color:black"|Particles size | |style="background:LightGrey; color:black"|Particles size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*0.15 µm to 3 µm | *0.15 µm to > 3 µm | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Througput | |style="background:LightGrey; color:black"|Througput | ||