Specific Process Knowledge/Etch/Wet Gold Etch: Difference between revisions
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==Etching of Gold== | ==Etching of Gold== | ||
[[Image:fumehoodetch-gold.jpg |300x300px|thumb|Wet Gold Etch: Done in the fumehood positioned in cleanroom 2]] | [[Image:fumehoodetch-gold.jpg |300x300px|thumb|Wet Gold Etch: Done in the fumehood positioned in cleanroom 2]] | ||
Etching of Gold is done wet at Danchip making your own set up in a beaker in the fumehood. We have two different solutions: | Etching of Gold is done wet at Danchip making your own set up in a beaker in the fumehood. You can see the APV [http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. | ||
We have two different solutions: | |||
# Iodine etch: KI:I<sub>2</sub>:H<sub>2</sub>O - 100g:25g:500ml - standard at Danchip. Can be used with AZ resist as mask. | # Iodine etch: KI:I<sub>2</sub>:H<sub>2</sub>O - 100g:25g:500ml - standard at Danchip. Can be used with AZ resist as mask. | ||