Specific Process Knowledge/Lithography/UVLithography: Difference between revisions

Revision as of 07:56, 12 August 2013

Process	Resist Type	Comment 1	Comment 2	Comment 3
Lift off	NLOF	AA	BB	CC
Dry Etch	DD DD1 DD2	EE	FF	GG
Wet Etch	HH HH1 HH2	II	JJ	KK

Resist	Comments	Pre-treatment	Resist Coating	Exposure	Baking	Developing	Stripping, Lift-off
AA	AA	AA	AA	AA	AA	AA	AA
BB	BB	BB	BB	BB	BB	BB	BB
CC	CC	CC	CC	CC	CC	CC	CC

@@ Line 97: / Line 97: @@
 <br clear="all" />
+{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="100%"
+|-
+|-
+|-style="background:silver; color:black"
+|'''Resist'''
+|'''Polarity'''
+|'''Manufacturer'''
+|'''Comments'''
+|'''Technical reports'''
+|'''Spinner'''
+|'''Developer'''
+|'''Rinse'''
+|'''Remover'''
+|'''Process flows (in docx-format)'''
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''AZ5214E'''
+|Positive
+|
+|
+|
+|
+|
+|
+|
+|
+|-
+|-style="background:LightGrey; color:black"
+|'''AZ4562'''
+|Positive
+|
+|
+|
+|
+|
+|
+|
+|
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''AZ MiR 701'''
+|
+|
+|
+|
+|
+|
+|
+|
+|
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''AZ nLOF 2020'''
+|Negative
+|
+|
+|
+|
+|
+|
+|
+|
+|-
+|-style="background:LightGrey; color:black"
+|'''SU8'''
+|Positive
+|
+|
+|
+|
+|
+|
+|
+|
+|}