Specific Process Knowledge/Lithography: Difference between revisions

@@ Line 172: / Line 172: @@
 |-
-| style="width: 20%"|
+| style="width: 40%"|
+{| style="color: black;" width="100%"
+| colspan="2" |
+|-
+| style="width: 50%"|
 ==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]==
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 *[[Specific Process Knowledge/Lithography/UVExposure#III-V Aligner|III-V Aligner]]
-| style="width: 20%"|
+| style="width: 50%"|
 ===[[Specific Process Knowledge/Lithography/Baking|Baking]]===
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 ===[[Specific Process Knowledge/Lithography/WaferCleaning|Wafer Cleaning]]===
+|}
 | style="width: 20%;"|