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Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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<gallery caption="Cassette loader and sample mounling." widths="800px" heights="600px"
<gallery caption="Cassette loader and sample mounling." widths="800px" heights="600px"
00px" perrow="2">
00px" perrow="1">
image:Kaempe_Lesker_Load_Loak_image1.png| The load lock chamber.
image:Kaempe_Lesker_Load_Loak_image1.png| The load lock chamber.
image:Kaempe_Lesker_Load_Loak_image2.png| Sample holder, carrier ring and load lock shelf.
image:Kaempe_Lesker_Load_Loak_image2.png| Sample holder, carrier ring and load lock shelf.
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