Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions
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==Recipes on PECVD2 for deposition of silicon nitride and silicon oxynitride == | ==Recipes on PECVD2 for deposition of silicon nitride and silicon oxynitride == | ||
'''<span style="color:Red">Expired Recipes! The PECVD2 has been decomissioned and is no longer available | '''<span style="color:Red">Expired Recipes! The PECVD2 has been decomissioned and is no longer available.</span>''' | ||
===Recipes=== | ===Recipes=== | ||
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