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Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions

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<gallery caption="Process chamber (PC 1)" widths="600px" heights="600px" perrow="2">
<gallery caption="Process chamber (PC 1)" widths="400px" heights="350px" perrow="2">
image:PC1_photo.png| Photo of the chamber.
image:PC1_photo.png| Photo of the chamber.
image:PC1_during_sputtering.png| Deposition from source 2.  
image:PC1_during_sputtering.png| Deposition from source 2.  
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