Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions

Revision as of 18:15, 22 March 2020 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,346 edits →Process information ← Older edit		Revision as of 18:16, 22 March 2020 view source Eves (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,346 edits →Batch process Newer edit →
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	==Batch process==		==Batch process==

	The advance system with the cassette loader and robot arm, allow running a batch process ("Master Cassette" recipes). These processes are not among the standard recipes but can be developed by DTU Nanolab upon ~~the~~ request.		The advance system with the cassette loader and robot arm, allow running a batch process ("Master Cassette" recipes). These processes are not among the standard recipes but can be developed by DTU Nanolab upon request.