Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="2" | |||
!colspan="6" border="none" style="background:silver; color:black;" align="center"|Power Supply ID | |||
|style="background:WhiteSmoke; color:black"|<b>Type</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Maximum output power (W)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Maximum output voltage (V)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Maximum output current (A)</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Comments</b> | |||
|- | |||
!style="background:silver; color:black;" align="center" width="60"|PC1 Power Supply 1 | |||
|style="background:WhiteSmoke; color:black"|RF | |||
|style="background:WhiteSmoke; color:black"|300 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 3 | |||
|style="background:WhiteSmoke; color:black"|DC | |||
|style="background:WhiteSmoke; color:black"|500 | |||
|style="background:WhiteSmoke; color:black"|1000 | |||
|style="background:WhiteSmoke; color:black"|4 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 4 | |||
|style="background:WhiteSmoke; color:black"|DC | |||
|style="background:WhiteSmoke; color:black"|500 | |||
|style="background:WhiteSmoke; color:black"|1000 | |||
|style="background:WhiteSmoke; color:black"|4 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 5 | |||
|style="background:WhiteSmoke; color:black"|Pulse DC | |||
|style="background:WhiteSmoke; color:black"|2000 | |||
|style="background:WhiteSmoke; color:black"|800 | |||
|style="background:WhiteSmoke; color:black"|5 | |||
|style="background:WhiteSmoke; color:black"| | |||
Max frequency: 100kHz | |||
Max reverse time: 10µs | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 7 | |||
|style="background:WhiteSmoke; color:black"|RF (Substrate) | |||
|style="background:WhiteSmoke; color:black"|100 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 1 | |||
|style="background:WhiteSmoke; color:black"|RF | |||
|style="background:WhiteSmoke; color:black"|300 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 2 | |||
|style="background:WhiteSmoke; color:black"|Pulse DC | |||
|style="background:WhiteSmoke; color:black"|2000 | |||
|style="background:WhiteSmoke; color:black"|800 | |||
|style="background:WhiteSmoke; color:black"|5 | |||
|style="background:WhiteSmoke; color:black"| | |||
Max frequency: 100kHz | |||
Max reverse time: 10µs | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 3 | |||
|style="background:WhiteSmoke; color:black"|DC to HiPIMS | |||
|style="background:WhiteSmoke; color:black"|1500 | |||
|style="background:WhiteSmoke; color:black"|1000 | |||
|style="background:WhiteSmoke; color:black"|4 | |||
|style="background:WhiteSmoke; color:black"| | |||
HiPIMS Unit | |||
Time Avg. Power: 1.5kW | |||
Output Peak Voltage: | |||
-1000V nominal, | |||
-1250V tolerant | |||
Output Peak Current: | |||
200A nominal, | |||
400A toleran | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 5 | |||
|style="background:WhiteSmoke; color:black"|DC | |||
|style="background:WhiteSmoke; color:black"|500 | |||
|style="background:WhiteSmoke; color:black"|1000 | |||
|style="background:WhiteSmoke; color:black"|4 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 6 | |||
|style="background:WhiteSmoke; color:black"|RF (substrate) | |||
|style="background:WhiteSmoke; color:black"|100 | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|style="background:WhiteSmoke; color:black"|-- | |||
|- | |||
|} | |||
== Sputter-System Metal-Oxide(PC1) == | == Sputter-System Metal-Oxide(PC1) == | ||