LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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*'''Supervisors:'''Henri Jansen, Flemming Jensen, Jörg Hübner | *'''Supervisors:'''Henri Jansen, Flemming Jensen, Jörg Hübner | ||
*'''Partners involved:''' DTU Danchip | *'''Partners involved:''' DTU Danchip | ||
*'''Full Thesis''': https://orbit.dtu.dk/en/publications/technology-development-of-3d-silicon-plasma-etching-processes-for | |||
==Project Description== | ==Project Description== | ||