LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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Below are images illustrating works that have been done during the ph.d. projects. | Below are images illustrating works that have been done during the ph.d. projects. | ||
<gallery caption="" widths="380px" heights="300px" perrow="3"> | <gallery caption="" widths="380px" heights="300px" perrow="3"> | ||
image:3D_PhC.png| 3D silicon photonic crystal membranes. | image:3D_PhC.png| 1. 3D silicon photonic crystal membranes. | ||
image:Scallops.png| Comparison of scallops by traditional Bosch process and modified DREM process. | image:Scallops.png| 2. Comparison of scallops by traditional Bosch process and modified DREM process. | ||
image:3Dmicro.png| 3D silicon microstructures fabricated by DREM process. | image:3Dmicro.png| 3. 3D silicon microstructures fabricated by DREM process. | ||
image:SiZnO.png| 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation. | image:SiZnO.png| 4. 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation. | ||
image:SiNanoColor.png| 3D silicon stacked nanowires for structural color generation. | image:SiNanoColor.png| 5. 3D silicon stacked nanowires for structural color generation. | ||
image:SiMicroPillars.png| High aspect ratio silicon micropillars fabricated with DREM process. | image:SiMicroPillars.png| 6. High aspect ratio silicon micropillars fabricated with DREM process. | ||
image:ZIF8.png| ZIF-8 crystals for tunable structural colors. | image:ZIF8.png| 7. ZIF-8 crystals for tunable structural colors. | ||
image:FConPegasus.png| Using OES to monitor the fluorocarbon film deposition with Pegasus 1. | image:FConPegasus.png| 8. Using OES to monitor the fluorocarbon film deposition with Pegasus 1. | ||
</gallery> | </gallery> | ||