Jump to content

LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions

← Older editNewer edit →
VisualWikitext
Bincha (talk | contribs)
DCH-Employees-701, NLAB-LabmanagerAllUsers
193 edits
Bincha (talk | contribs)
DCH-Employees-701, NLAB-LabmanagerAllUsers
193 edits
Line 119: Line 119:
image:Scallops.png| Comparison of scallops by traditional Bosch process and modified DREM process.
image:Scallops.png| Comparison of scallops by traditional Bosch process and modified DREM process.
image:3Dmicro.png| 3D silicon microstructures fabricated by DREM process.
image:3Dmicro.png| 3D silicon microstructures fabricated by DREM process.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:SiZnO.png| 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
</gallery>
</gallery>
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Technology_Research/Technology_Development_of_3D_Silicon_Plasma_Etching_process_for_Novel_Devices_and_Applications"