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LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions

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DCH-Employees-701, NLAB-LabmanagerAllUsers
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<gallery caption="Fabricated metamaterials based on Al-doped ZnO (AZO). Measurements performed using Fourier Trasform Infrared Spectroscopy (FTIR)." widths="500px" heights="500px" perrow="4">
<gallery caption="Fabricated metamaterials based on Al-doped ZnO (AZO). Measurements performed using Fourier Trasform Infrared Spectroscopy (FTIR)." widths="500px" heights="500px" perrow="4">
image:AZO_Air_trench_SEM.jpg| AZO trenches in air host. SEM image, bird-eye-view.
image:3D_PhC.png| 3D silicon photonic crystal membranes. SEM image, bird-eye-view.
image:AZO_Si_trench_SEM.jpg| AZO trenches in Si host. SEM image, bird-eye-view.
image:AZO_Si_trench_SEM.jpg| AZO trenches in Si host. SEM image, bird-eye-view.
image:pillars.jpg| AZO pillars. SEM image, bird-eye-view.
image:pillars.jpg| AZO pillars. SEM image, bird-eye-view.
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