LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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==Student projects== | ==Student projects== | ||
During the ph.d. projects, following student projects have been performed for bachelor students. | During the ph.d. projects, following student projects have been performed for bachelor students. The final student reports can be found in the cleanroom drive: [O:\CleanroomDrive\bincha\3 week courses Link] | ||
*;'''High Resolution Pattern Definition with Electron Beam Lithography''' | *;'''High Resolution Pattern Definition with Electron Beam Lithography''' | ||