Specific Process Knowledge/Etch/Etching of Polymer/Polymer Etch by ASE: Difference between revisions
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== Etching of polymers on the ASE | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Polymer/Polymer_Etch_by_ASE click here]''' | ||
<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
<!--Page reviewed by jmli 9/8-2022 --> | |||
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= Etching of polymers on the ASE = | |||
SPTS has provided some recipes for polymer etching on the ASE. They have NOT been tested yet (As of August 2011) and we are therefore very interested in learning whatever experiences you have. Please contact Jonas. The recipes are located in the root folder. Please copy them to your own folder and modify them there for your own purposes as you would with any other recipe. | SPTS has provided some recipes for polymer etching on the ASE. They have NOT been tested yet (As of August 2011) and we are therefore very interested in learning whatever experiences you have. Please contact Jonas. The recipes are located in the root folder. Please copy them to your own folder and modify them there for your own purposes as you would with any other recipe. | ||
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! colspan="2" align="center"| Materials | ! colspan="2" align="center"| Materials | ||
! colspan="8" align="center"| Process parameters | ! colspan="8" align="center"| Process parameters | ||
! rowspan="2" align="center" width="300" | Comments by Kevin Riddell SPTS prior to any tests at | ! rowspan="2" align="center" width="300" | Comments by Kevin Riddell SPTS prior to any tests at Nanolab | ||
|- | |- | ||
| Mask | | Mask | ||
| Etched | | Etched | ||
| O<sub>2</sub> | | O<sub>2</sub> | ||
| CO<sub>2</sub> | | CO<sub>2</sub> (no available anymore) | ||
| SF<sub>6</sub> | | SF<sub>6</sub> | ||
| He/Ar | | He/Ar | ||
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== CYTOP etching: Results by Fei Wang, DTU Nanotech == | |||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
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image:ASEpolymerEtching-cytop3.jpg| Profile | image:ASEpolymerEtching-cytop3.jpg| Profile | ||
</gallery> | </gallery> | ||
==SU8== | |||
[[Specific Process Knowledge/Etch/Etching of SU-8|Etching of SU-8]] | |||
==TOPAS== | |||
[[Specific Process Knowledge/Etch/Etching of TOPAS|Etching of Topas]] | |||