Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/211nmzep: Difference between revisions
Created page with "<gallery caption="The profiles of the 340 nm zep resist" widths="250" heights="200" perrow="3"> image:WF_2E02_mar23_2011-030.jpg|The 30 nm zep profile image:WF_2E02_mar23_2011..." |
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<gallery caption="The profiles of the 340 nm zep resist" widths="250" heights="200" perrow="3"> | <gallery caption="The profiles of the 340 nm zep resist" widths="250" heights="200" perrow="3"> | ||
image:WF_2E02_mar23_2011-030.jpg|The 30 nm zep profile | image:WF_2E02_mar23_2011-030.jpg|The 30 nm zep profile | ||