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== How to read the SPTS notation on process recipes ==
<!-- Ok, jmli 20170627 -->
<!-- Ok, jmli 2020-0120 -->
<!-- Page reviewed 9/8-2022 jmli -->
<!-- Page reviewed 28/6-2023 jmli -->


To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below:  
{{contentbydryetch}}
 
== How to read the notation on process recipes ==
<!-- revised 1/6-2015 by jmli -->
Look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below:  
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as:
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as:
## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end
## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end
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|-
|-
!  
!  
! colspan="2" | Step 1
| colspan="2" | Step 1
! colspan="2" | Step 2  
| colspan="2" | Step 2  
|-
|-
! width="120" | Parameter   
| width="120" | Parameter   
! width="120" | Etch
| width="120" | Etch
! width="120" | Dep
| width="120" | Dep
! width="120" | Etch
| width="120" | Etch
! width="120" | Dep
| width="120" | Dep
|-
|-
! Gas flow (sccm)  
| Gas flow (sccm)  
| SF<sub>6</sub> 350 (1.5 s) 550
| SF<sub>6</sub> 350 (1.5 s) 550
| C<sub>4</sub>F<sub>8</sub> 200
| C<sub>4</sub>F<sub>8</sub> 200
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| C<sub>4</sub>F<sub>8</sub> 200
| C<sub>4</sub>F<sub>8</sub> 200
|-
|-
! Cycle time (secs)  
| Cycle time (secs)  
| 7.0
| 7.0
| 4.0
| 4.0
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| 4.0
| 4.0
|-
|-
! Pressure (mtorr)  
| Pressure (mtorr)  
| '''25 (1.5 s) 90 >> 150'''
! '''25 (1.5 s) 90 >> 150'''
| 25
| 25
| 25 (1.5 s) 150
| 25 (1.5 s) 150
| 25
| 25
|-
|-
! Coil power (W)  
| Coil power (W)  
| 2800  
| 2800  
| 2000
| 2000
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| 2000
| 2000
|-
|-
! Platen power (W)
| Platen power (W)
| '''120 >> 140 (1.5) 45'''
! '''120 >> 140 (1.5) 45'''
| 0
| 0
| 140 (1.5) 45
| 140 (1.5) 45
| 0  
| 0  
|-
|-
! Cycles   
| Cycles   
| colspan="2" | 11 (keep fixed)
| colspan="2" | 11 (keep fixed)
| colspan="2" | 44 (vary this)
| colspan="2" | 44 (vary this)
|-
|-
! Common  
| Common  
| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
| colspan="4" | Temperature 20 degs, HBC 10 torr
|}
|}
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