Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
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== How to read the notation on process recipes == | |||
<!-- revised 1/6-2015 by jmli --> | |||
Look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below: | |||
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | # The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | ||
## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ||
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## In the first 1.5 seconds the pressure is constant at 25 mtorr. | ## In the first 1.5 seconds the pressure is constant at 25 mtorr. | ||
## During the remainder of the cycle the pressure has i higher value that is ramped from 90 initially to 150 mtorr in the last etch cycle. | ## During the remainder of the cycle the pressure has i higher value that is ramped from 90 initially to 150 mtorr in the last etch cycle. | ||
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | |||
|+ '''Process A recipe''' | |||
|- | |||
! | |||
| colspan="2" | Step 1 | |||
| colspan="2" | Step 2 | |||
|- | |||
| width="120" | Parameter | |||
| width="120" | Etch | |||
| width="120" | Dep | |||
| width="120" | Etch | |||
| width="120" | Dep | |||
|- | |||
| Gas flow (sccm) | |||
| SF<sub>6</sub> 350 (1.5 s) 550 | |||
| C<sub>4</sub>F<sub>8</sub> 200 | |||
| SF<sub>6</sub> 350 (1.5 s) 550 | |||
| C<sub>4</sub>F<sub>8</sub> 200 | |||
|- | |||
| Cycle time (secs) | |||
| 7.0 | |||
| 4.0 | |||
| 7.0 | |||
| 4.0 | |||
|- | |||
| Pressure (mtorr) | |||
! '''25 (1.5 s) 90 >> 150''' | |||
| 25 | |||
| 25 (1.5 s) 150 | |||
| 25 | |||
|- | |||
| Coil power (W) | |||
| 2800 | |||
| 2000 | |||
| 2800 | |||
| 2000 | |||
|- | |||
| Platen power (W) | |||
! '''120 >> 140 (1.5) 45''' | |||
| 0 | |||
| 140 (1.5) 45 | |||
| 0 | |||
|- | |||
| Cycles | |||
| colspan="2" | 11 (keep fixed) | |||
| colspan="2" | 44 (vary this) | |||
|- | |||
| Common | |||
| colspan="4" | Temperature 20 degs, HBC 10 torr | |||
|} | |||